• DocumentCode
    85128
  • Title

    Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part II: Characterization

  • Author

    Hong Li ; Wei Liu ; Cassell, Alan M. ; Kreupl, Franz ; Banerjee, Kunal

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA
  • Volume
    60
  • Issue
    9
  • fYear
    2013
  • fDate
    Sept. 2013
  • Firstpage
    2870
  • Lastpage
    2876
  • Abstract
    Due to the enormous challenges of fabricating long horizontally aligned carbon nanotube (HACNT) bundle interconnects, there exists little research on characterization of long HACNT interconnects. In this paper, taking advantage of our unique HACNT fabrication process outlined in the companion paper, the electrical and self-heating characterization of long HACNT bundles are reported. Negative temperature coefficients of resistance for both per unit length resistance and metal-CNT contact resistance are confirmed from measurements. This first report on the electrical and thermal characterization fills the wide gap between CNT interconnect modeling efforts and corresponding experimental efforts by providing many important extracted parameters that are critical in various modeling and analyses.
  • Keywords
    carbon nanotubes; contact resistance; interconnections; HACNT fabrication process; electrical characterization; interconnect applications; low-resistivity long-length horizontal carbon nanotube bundles; metal-CNT contact resistance; negative temperature coefficients; per unit length resistance; self-heating characterization; thermal characterization; Atmospheric measurements; Conductivity; Current density; Electrical resistance measurement; Fabrication; Resistance; Temperature measurement; Carbon nanotubes; characterization; horizontally aligned; interconnects; resistivity; self-heating; temperature coefficient of resistance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2013.2275258
  • Filename
    6581868