Cryogenic Temperature Measurement Using Silicon Carbide-Based Wireless Optical Sensor

Demonstrated is a novel silicon carbide (SiC)-based wireless optical sensor for cryogenic temperatures. The proposed design uses two wavelength processing and free-space optical beam interrogation of a remoted single crystal SiC chip placed in the cryogenic vacuum chamber to enable wireless temperature measurement. Experimental temperature sensing using the proposed sensor is reported from near room temperature to 100 K with an estimated 0.2 K resolution. The sensor uses eye safe laser wavelengths at 1550 and 1540 nm to implement the signal processing to determine the temperature value