Title :
Bulk acoustic wave RF technology
Author :
Bi, Frank Z. ; Barber, Bradley P.
Author_Institution :
Skyworks Solutions Inc., Woburn, MA
Abstract :
In this article, we will provide an overview of BAW filter technology by discussing comparison between BAW and SAW RF filter technologies, working principles of BAW resonator and filter, BAW resonator key performance parameters, comparison between free-standing bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR) technologies, status of BAW resonator design and models, BAW filter manufacturing challenges, and future BAW technology improvement directions.
Keywords :
bulk acoustic wave devices; radiofrequency filters; surface acoustic wave resonator filters; BAW RF filter technologies; BAW filter technology; BAW resonator; SAW RF filter technologies; bulk acoustic wave RF technology; free-standing bulk acoustic resonator; solidly mounted resonator technologies; Acoustic waves; Impedance; Insertion loss; Passband; Radio frequency; Resonant frequency; Resonator filters; SAW filters; Shunt (electrical); Surface acoustic waves;
Journal_Title :
Microwave Magazine, IEEE
DOI :
10.1109/MMM.2008.927633
