Monolithic integration of waveguide polymer electrooptic modulators on VLSI circuitry

Author

Kalluri, Srinath ; Ziari, Mehrdad ; Chen, Antao ; Chuyanov, Vadim ; Steier, William H. ; Chen, Datong ; Jalali, Bahram ; Fetterman, Harold ; Dalton, Larry R.

Author_Institution

Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA

Volume

8

Issue

5

fYear

1996

fDate

5/1/1996 12:00:00 AM

Firstpage

644

Lastpage

646

Abstract

We demonstrated some of the critical technology that is needed for the monolithic integration of polymer electrooptic modulators and VLSI circuitry by fabricating and testing a phase slab modulator on nonplanar VLSI circuits. We demonstrated the survival of GaAs MESFET´s to the high-voltage poling and polymer modulator fabrication procedures. We also implemented an electrical interconnect scheme between the electronics and photonics layers.

Keywords

MESFET integrated circuits; VLSI; electro-optical modulation; integrated optoelectronics; monolithic integrated circuits; optical fabrication; optical polymers; optical testing; optical waveguide components; optical waveguides; GaAs; GaAs MESFET; VLSI circuitry; critical technology; electrical interconnect scheme; electronics layers; fabrication; high-voltage poling; monolithic integration; nonplanar VLSI circuits; phase slab modulator; photonics layers; polymer electrooptic modulators; polymer modulator fabrication procedures; testing; waveguide polymer electrooptic modulators; Circuit testing; Electrooptic modulators; Electrooptical waveguides; Gallium arsenide; MESFETs; Monolithic integrated circuits; Phase modulation; Polymers; Slabs; Very large scale integration;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.491566

Filename

491566