0.1 dB/cm waveguide losses in single-mode SOI rib waveguides

Author

Fischer, U. ; Zinke, T. ; Kropp, J.-R. ; Arndt, F. ; Petermann, K.

Author_Institution

Inst. fur Hochfrequenztech., Tech. Univ. Berlin, Germany

Volume

8

Issue

5

fYear

1996

fDate

5/1/1996 12:00:00 AM

Firstpage

647

Lastpage

648

Abstract

Waveguide losses as low as 0.1 dB/cm at a wavelength of /spl lambda/=1.3 μm have been achieved in SOI rib waveguides fabricated by wet chemical etching. The single-mode waveguides have a large cross section yielding field mismatch losses to a standard single-mode fiber of only 0.17 dB/facet (both polarizations). Polarization independent fiber-chip-fiber insertion losses of 0.9 dB (best 0.5 dB) at a chip length of 60 mm have been measured.

Keywords

etching; integrated optics; optical fabrication; optical fibre couplers; optical fibre losses; optical losses; optical waveguide components; optical waveguides; rib waveguides; silicon-on-insulator; 0.9 dB; 1.3 mum; Si-SiO/sub 2/; chip length; cross section; field mismatch losses; polarization independent fiber-chip-fiber insertion losses; single-mode rib waveguides; standard single-mode fiber; waveguide losses; wet chemical etching; Chemicals; Loss measurement; Optical coupling; Optical fiber devices; Optical fiber losses; Optical fiber polarization; Optical waveguides; Silicon on insulator technology; Wavelength measurement; Wet etching;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.491567

Filename

491567