Millimetre-wave active probe frequency-multiplier for on-wafer characterisation of GaAs devices and ICs

A millimetre-wave active probe quintupler with an output frequency range of 60 to 100 GHz has been developed. The frequency multiplier circuit was implemented in a coplanar waveguide. Using this probe along with the electro-optic sampling technique, on-wafer millimetre-wave vector measurement up to 100 GHz and time-waveform measurement at 77 GHz of test structures on a GaAs substrate have been demonstrated.