Title :
Evolution of a particulate cloud in an RF plasma
Author :
Praburam ; Goree
Author_Institution :
Dept. of Phys., Iowa Univ., Iowa City, IA, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
Video images of a cloud of carbon particulates grown in an RF sputtering plasma show a cyclic process of cloud growth, instability, and collapse
Keywords :
carbon; plasma production; sputtering; video recording; C; C particulate cloud evolution; RF sputtering plasma; collapse; cyclic process; instability; video images; Clouds; Dusty plasma; Electrodes; Light scattering; Particle scattering; Plasma accelerators; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
