Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering

Author

Dorier, J.L. ; Hollenstein, C. ; Howling, A.A. ; Courteille, C. ; Schwarzenbach, W. ; Merad, A. ; Boeuf, J.P.

Author_Institution

EPFL, Lausanne, Switzerland

Volume

24

Issue

1

fYear

1996

fDate

2/1/1996 12:00:00 AM

Firstpage

101

Lastpage

102

Abstract

Understanding particle dynamics requires comparison of spatially resolved measurements with two-dimensional (2-D) simulations. In this work, a cross section of a capacitive discharge is illuminated with an expanded laser beam, and global scattered light is recorded by camera. Plasma equipotentials are visualized using the scattered intensity from a small amount of particles trapped in an argon plasma. At low RF voltages, good agreement is found with 2-D fluid simulations, whereas displacement of the power clouds toward the sheaths is observed at high voltage

Keywords

high-frequency discharges; plasma diagnostics; plasma impurities; plasma simulation; 2D fluid simulations; Ar; Ar plasma; capacitive RF plasmas; capacitive discharge; expanded laser beam; global visualization; low RF voltages; particle dynamics; plasma equipotentials; powder trapping; scattered intensity; spatially resolved measurements; two-dimensional laser scattering; Light scattering; Particle measurements; Particle scattering; Plasma measurements; Plasma sheaths; Plasma simulation; Powders; Radio frequency; Spatial resolution; Visualization;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.491732

Filename

491732