Title :
In situ sensor of spatially resolved optical emission
Author :
Buie, M.J. ; Pender, J.T.P. ; Holloway, James P. ; Brake, Mary L.
Author_Institution :
Dept. of Nucl. Eng., Michigan Univ., Ann Arbor, MI
fDate :
2/1/1996 12:00:00 AM
Abstract :
An experimental study of the uniformity of the plasma emission from the gaseous electronics conference reference cell was conducted using a diagnostic technique refined at the University of Michigan known as spatially resolved optical emission spectroscopy (SR-OES). This diagnostic will provide immediate spatially resolved feedback regarding the plasma species emissivity
Keywords :
plasma confinement; plasma devices; plasma diagnostics; plasma light propagation; sensors; diagnostic technique; gaseous electronics conference reference cell; in situ sensor; plasma emission uniformity; plasma species emissivity; spatially resolved feedback; spatially resolved optical emission; spatially resolved optical emission spectroscopy; Argon; Electrodes; Optical feedback; Optical sensors; Plasma confinement; Plasma diagnostics; Plasma measurements; Polynomials; Spatial resolution; Stimulated emission;
Journal_Title :
Plasma Science, IEEE Transactions on
