DocumentCode
860158
Title
Author\´s reply [to comments on "A shield-based three-port de-embedding method for microwave on-wafer characterization of deep-submicrometer silicon MOSFETs"]
Author
Cho, Ming-Hsiang
Author_Institution
Nat. Nano Device Labs., Hsinchu, Taiwan
Volume
54
Issue
3
fYear
2006
fDate
3/1/2006 12:00:00 AM
Firstpage
1296
Lastpage
1297
Abstract
For original article by Ming-Hsiang Cho et al. see ibid., vol.53, no.9, p.2926-34, Sep. 2005. For comments by T. Kaija and P. Heino see ibid., vol.54, no.3, p.1295-6, March 2006.
Keywords
MOSFET; S-parameters; microwave measurement; multiport networks; semiconductor device measurement; semiconductor device testing; silicon; Si; deep-submicrometer MOSFET; dummy fixture set; microwave on-wafer characterization; scattering parameters; shield-based three-port de-embedding method; Data mining; Electrical resistance measurement; Fixtures; Impedance; Leg; MOSFETs; Microwave devices; Microwave transistors; Silicon; Testing;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/TMTT.2006.869699
Filename
1603881
Link To Document