Title :
Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates
Author :
Barth, R. ; Siewert, J. ; Spangenberg, B. ; Jaekel, C. ; Kurz, H. ; Utz, B. ; Prusseit, W. ; Kinder, H. ; Wolf, H.
Author_Institution :
Inst. fur Halbleitertechnik II, Tech. Hochschule Aachen, Germany
fDate :
6/1/1995 12:00:00 AM
Abstract :
The fabrication sequence of Y-Ba-Cu-O air-bridge microbolometers on silicon substrates is described. A comparison of air-bridge microbolometers and bolometers on bulk silicon is given. The bolometric response of the bolometers is studied with chopped IR illumination at a wavelength of 1.3 /spl mu/m. The influence of the fabrication technique on the bolometer performance is discussed. Measurements of the voltage noise in free-standing Y-Ba-Cu-O microbolometers are presented and compared with the predicted values.<>
Keywords :
barium compounds; bolometers; electron device manufacture; high-temperature superconductors; infrared detectors; superconducting device noise; superconducting epitaxial layers; yttrium compounds; 1.3 micron; Si; Y-Ba-Cu-O; chopped IR illumination; free-standing epitaxial Y-Ba-Cu-O air bridge microbolometers; microfabrication; silicon substrates; voltage noise; Bolometers; Buffer layers; Noise measurement; Optical device fabrication; Optical noise; Silicon; Substrates; Thermal conductivity; Transistors; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
