DocumentCode
862124
Title
Impurity atom distribution from a two-step diffusion process
Author
Kennedy, D.P. ; Murley, P.C.
Volume
52
Issue
5
fYear
1964
fDate
5/1/1964 12:00:00 AM
Firstpage
620
Lastpage
621
Keywords
Boundary conditions; Conducting materials; Conductors; Diffusion processes; Equations; Fabrication; Geometry; Semiconductor impurities; Semiconductor materials; Temperature;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1964.3018
Filename
1444948
Link To Document