DocumentCode

862702

Title

Low temperature passivation of silicon devices using evaporated lead film

Author

Tokuyama, Takeshi

Volume

52

Issue

6

fYear

1964

fDate

6/1/1964 12:00:00 AM

Firstpage

723

Lastpage

724

Keywords

Atmosphere; Heating; Lead compounds; Optical films; Passivation; Semiconductor films; Silicon compounds; Silicon devices; Substrates; Temperature distribution;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/PROC.1964.3071

Filename

1445001