GaAs:GaAlAs ridge waveguide lasers and their monolithic integration using the ion beam etching process

Author

Bouadma, N. ; Correc, Pascal ; Brillouet, François P.

Author_Institution

CNET, Bagneux, France

Volume

25

Issue

11

fYear

1989

fDate

11/1/1989 12:00:00 AM

Firstpage

2219

Lastpage

2228

Abstract

The fabrication and performance characteristics of GaAs/GaAlAs ridge waveguide lasers are discussed. Threshold currents as low as 8 mA and differential quantum efficiencies as high as 90% were obtained for 250-μm-long graded-index separate-confinement heterostructure with single quantum well (GRINSCH SQW) lasers. High-speed short-cavity ridge waveguide lasers for which both the ridge stripe and one-mirror facet were formed by Ar-ion beam etching were achieved. The dependence of threshold current and lasing spectra on the cavity length were theoretically and experimentally investigated. This process was successfully used to integrate a laser diode monolithically with a photodiode or a field-effect transistor

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; gradient index optics; integrated optics; integrated optoelectronics; laser cavity resonators; optical waveguides; semiconductor junction lasers; sputter etching; 250 micron; 8 mA; 90 percent; Ar; GRINSCH SQW; GaAs-GaAlAs; cavity length; differential quantum efficiencies; fabrication; field-effect transistor; graded-index separate-confinement heterostructure; ion beam etching; laser diode; lasers; lasing spectra; monolithic integration; one-mirror facet; performance characteristics; photodiode; ridge stripe; ridge waveguide lasers; semiconductor laser; short-cavity; single quantum well; threshold current; Diode lasers; Etching; Gallium arsenide; Laser beams; Laser theory; Monolithic integrated circuits; Optical device fabrication; Quantum well lasers; Threshold current; Waveguide lasers;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/3.42050

Filename

42050