Title :
Magnetic properties of compositionally modulated Fe-based nitride alloy films
Author :
Sakakima, H. ; Ihara, K. ; Osano, K. ; Kaminaka, N.
Author_Institution :
Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
fDate :
9/1/1990 12:00:00 AM
Abstract :
Fe-based compositionally modulated films composed of five 100-nm-thick nonnitride and nitride layers were prepared by N2 reactive sputtering. Soft magnetic properties are obtained when the layer thickness is less than 15 nm for metal-metalloid-type alloy films such as Fe-Nb-B/Fe-Nb-B-N and when less than 30 nm for metal-metal type films such as Fe-Nb/Fe-Nb-N. The layered structure and the soft magnetic properties are thermally stable up to 600°C. The films having high saturation magnetization, 4ΠMs=12-16 kG, and high permeability, μ=2000-3000 (at 1 MHz), are promising head-core materials for high-density recording
Keywords :
boron alloys; boron compounds; iron alloys; iron compounds; magnetic heads; magnetic permeability; magnetic thin films; magnetisation; niobium alloys; niobium compounds; sputtered coatings; 600 degC; FeNb-FeNbN; FeNbB-FeNbBN; N2 reactive sputtering; compositionally modulated Fe-based nitride alloy films; head-core materials; high permeability; high saturation magnetization; high-density recording; layer thickness; layered structure; metal-metal type films; metal-metalloid-type alloy films; soft magnetic properties; Annealing; Coercive force; Iron; Magnetic films; Magnetic modulators; Magnetic properties; Phase modulation; Sputtering; Substrates; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
