Title :
Efficient and economical test equipment setup using procorrelation
Author :
Lin, Bin-Hong ; Luh, Hwei-Tsu Ann ; Wu, Cheng-Wen
Author_Institution :
Intellectual Property Libr. Co., Taiwan
Abstract :
The procorrelation system (PCS) obtains a high-quality correlation between die failures on a premanufactured recorded correlation wafer and the test equipment setup for the current wafer lot. PCS greatly reduces analysis time and test cost, compared with conventional full-wafer probing and offers significant benefits for deep-submicron ICs.
Keywords :
automatic test software; integrated circuit manufacture; integrated circuit testing; statistical analysis; deep-submicron ICs; full-wafer probing; premanufactured recorded correlation wafer; procorrelation system; statistical analysis; test equipment setup; test software; Cost benefit analysis; Degradation; Mass production; Performance evaluation; Personal communication networks; Probes; Retirement; Semiconductor device manufacture; Test equipment; Testing;
Journal_Title :
Design & Test of Computers, IEEE
DOI :
10.1109/MDT.2004.1261848