Sensors for harsh environments by direct-write thermal spray

Author

Longtin, Jon ; Sampath, Sanjay ; Tankiewicz, Szymon ; Gambino, Richard J. ; Greenlaw, Robert J.

Author_Institution

Center for Thermal Spray Res., State Univ. of New York, Stony Brook, NY, USA

Volume

4

Issue

1

fYear

2004

Firstpage

118

Lastpage

121

Abstract

High-temperature thermocouple sensors for harsh environments have been fabricated using thermal spray technology with excellent performance demonstrated. Concepts for strain sensors fabricated with thermal spray technology are also being developed. This work reports on functional high-temperature thermocouples and strain gauge concepts fabricated using thermal spray processing.

Keywords

nanotechnology; semiconductor device manufacture; semiconductor thin films; spray coating techniques; strain sensors; thermal spraying; thermocouples; direct-write electronics; direct-write sensors; direct-write thermal spray; high-temperature thermocouple sensors; high-temperature thermocouples; intelligent sensors; strain gauge; strain measurements; strain sensors; temperature measurement; thermal spray processing.; thermal spray sensors; Chemical sensors; Coatings; Intelligent sensors; Mechanical sensors; Plasma temperature; Protection; Rapid thermal processing; Temperature sensors; Thermal sensors; Thermal spraying;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2003.822218

Filename

1261871