DocumentCode
867597
Title
Magnetostriction and in-situ measurement of stress of Co/Pd compositionally modulated multilayer films during fabrication
Author
Awano, H. ; Suzuki, Y. ; Yamazaki, T. ; Katayama, T. ; Itoh, A.
Author_Institution
Dept. of Electron. Eng., Nihon Univ., Chiba, Japan
Volume
26
Issue
5
fYear
1990
fDate
9/1/1990 12:00:00 AM
Firstpage
2742
Lastpage
2744
Abstract
The internal stress (σint) at the interface of each layer of Co(8 Å)/Pd (40 Å) compositionally modulated multilayer film (CMF) was successfully measured with the aim of evaluating stress-induced anisotropy. The CMF was prepared by vacuum evaporation, and the in situ measurement of σint was done during fabrication. It was clarified that the Co layer was subject to constant large tensile stress from the Pd layer. This stress was much smaller than that estimated according to the lattice mismatch between Co and Pd. It was also found that Pd layer evaporated on Co layer was subject to compressive stress; however, it extended over only one or two monolayers before changing to tensile stress again. For the sputtered films, the magnetostriction constants were measured, and the relationship between perpendicular magnetic anisotropy and stress-induced anisotropy was examined
Keywords
induced anisotropy (magnetic); internal stresses; magnetic thin films; magnetostriction; metallic superlattices; palladium; sputtered coatings; vacuum deposited coatings; 40 angstroms; 8 angstroms; Co-Pd multilayer film; compositionally modulated multilayer film; compressive stress; in-situ stress measurement; lattice mismatch; magnetostriction constants; perpendicular magnetic anisotropy; sputtered films; stress-induced anisotropy; tensile stress; vacuum evaporation; Anisotropic magnetoresistance; Compressive stress; Fabrication; Internal stresses; Lattices; Magnetic modulators; Magnetic multilayers; Magnetostriction; Stress measurement; Tensile stress;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.104857
Filename
104857
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