• DocumentCode
    867597
  • Title

    Magnetostriction and in-situ measurement of stress of Co/Pd compositionally modulated multilayer films during fabrication

  • Author

    Awano, H. ; Suzuki, Y. ; Yamazaki, T. ; Katayama, T. ; Itoh, A.

  • Author_Institution
    Dept. of Electron. Eng., Nihon Univ., Chiba, Japan
  • Volume
    26
  • Issue
    5
  • fYear
    1990
  • fDate
    9/1/1990 12:00:00 AM
  • Firstpage
    2742
  • Lastpage
    2744
  • Abstract
    The internal stress (σint) at the interface of each layer of Co(8 Å)/Pd (40 Å) compositionally modulated multilayer film (CMF) was successfully measured with the aim of evaluating stress-induced anisotropy. The CMF was prepared by vacuum evaporation, and the in situ measurement of σint was done during fabrication. It was clarified that the Co layer was subject to constant large tensile stress from the Pd layer. This stress was much smaller than that estimated according to the lattice mismatch between Co and Pd. It was also found that Pd layer evaporated on Co layer was subject to compressive stress; however, it extended over only one or two monolayers before changing to tensile stress again. For the sputtered films, the magnetostriction constants were measured, and the relationship between perpendicular magnetic anisotropy and stress-induced anisotropy was examined
  • Keywords
    induced anisotropy (magnetic); internal stresses; magnetic thin films; magnetostriction; metallic superlattices; palladium; sputtered coatings; vacuum deposited coatings; 40 angstroms; 8 angstroms; Co-Pd multilayer film; compositionally modulated multilayer film; compressive stress; in-situ stress measurement; lattice mismatch; magnetostriction constants; perpendicular magnetic anisotropy; sputtered films; stress-induced anisotropy; tensile stress; vacuum evaporation; Anisotropic magnetoresistance; Compressive stress; Fabrication; Internal stresses; Lattices; Magnetic modulators; Magnetic multilayers; Magnetostriction; Stress measurement; Tensile stress;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.104857
  • Filename
    104857