DocumentCode

868083

Title

Observation of inversion layers under insulated-gate electrodes using a scanning-electron microscope

Author

Green, Dale ; Nathanson, H.C.

Volume

53

Issue

2

fYear

1965

Firstpage

183

Lastpage

184

Keywords

Brightness; Capacitance measurement; Displays; Electrodes; Electron beams; Insulation; Scanning electron microscopy; Silicon; Tunneling; Voltage;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/PROC.1965.3611

Filename

1445541