• DocumentCode
    868535
  • Title

    Measurements of charging in capacitive microelectromechanical switches

  • Author

    Reid, J.R. ; Webster, R.T.

  • Author_Institution
    Antenna Technol. Branch, Air Force Res. Lab., Hanscom AFB, MA, USA
  • Volume
    38
  • Issue
    24
  • fYear
    2002
  • fDate
    11/21/2002 12:00:00 AM
  • Firstpage
    1544
  • Lastpage
    1545
  • Abstract
    Charge build up in capacitive microelectromechanical switches is measured during continuous cycling. Under unipolar cycling, charge rapidly builds up in the dielectric causing the switch control voltages to shift. However, under bipolar cycling, there is no net accumulated charge, but instead a decrease in the magnitude of the control voltages.
  • Keywords
    charge measurement; coplanar waveguide components; microswitches; microwave switches; surface charging; bipolar cycling; capacitive microelectromechanical switches; charge build up measurement; continuous cycling; control voltage magnitude; coplanar waveguide; metal bridges; pull-in voltage; release voltage; surface charging; switch control voltage shift; unipolar cycling;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20021071
  • Filename
    1106106
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=868535