• DocumentCode
    87371
  • Title

    W-Shaped Cantilevers for Scanning Force Microscopy

  • Author

    Le Rouzic, J. ; Vairac, Pascal ; Cavallier, B. ; Cretin, B.

  • Author_Institution
    Dept. of Mech. Eng., Imperial Coll. London, London, UK
  • Volume
    13
  • Issue
    4
  • fYear
    2013
  • fDate
    Apr-13
  • Firstpage
    1340
  • Lastpage
    1346
  • Abstract
    This paper deals with the tip tilt occurring in scanning force microscopy during contact. Tangential forces lead to affect the localization of the measurement and prevent the quantification of local contact stiffness. Both are crucial for an accurate mechanical characterization of materials with high spatial resolution. Specific W-shaped cantilevers, using a mechanical compensating mechanism, have been designed to keep the tip vertical and get around these problems. They have been simulated with finite-element softwares and validated experimentally on the scanning microdeformation microscope. The promising results show that the principle could be used in other types of scanning force microscopies.
  • Keywords
    atomic force microscopy; cantilevers; deformation; elastic constants; elastic moduli measurement; finite element analysis; W-shaped cantilevers; finite-element softwares; high spatial resolution; local contact stiffness quantification; material mechanical characterization; mechanical compensating mechanism; scanning force microscopy; scanning microdeformation microscope; tangential forces; tip tilt; Finite element methods; Force; Microscopy; Shape; Silicon; Vibrations; Atomic force microscopy; micromechanical devices; sensor phenomena and characterization;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2012.2232784
  • Filename
    6376086