DocumentCode
87371
Title
W-Shaped Cantilevers for Scanning Force Microscopy
Author
Le Rouzic, J. ; Vairac, Pascal ; Cavallier, B. ; Cretin, B.
Author_Institution
Dept. of Mech. Eng., Imperial Coll. London, London, UK
Volume
13
Issue
4
fYear
2013
fDate
Apr-13
Firstpage
1340
Lastpage
1346
Abstract
This paper deals with the tip tilt occurring in scanning force microscopy during contact. Tangential forces lead to affect the localization of the measurement and prevent the quantification of local contact stiffness. Both are crucial for an accurate mechanical characterization of materials with high spatial resolution. Specific W-shaped cantilevers, using a mechanical compensating mechanism, have been designed to keep the tip vertical and get around these problems. They have been simulated with finite-element softwares and validated experimentally on the scanning microdeformation microscope. The promising results show that the principle could be used in other types of scanning force microscopies.
Keywords
atomic force microscopy; cantilevers; deformation; elastic constants; elastic moduli measurement; finite element analysis; W-shaped cantilevers; finite-element softwares; high spatial resolution; local contact stiffness quantification; material mechanical characterization; mechanical compensating mechanism; scanning force microscopy; scanning microdeformation microscope; tangential forces; tip tilt; Finite element methods; Force; Microscopy; Shape; Silicon; Vibrations; Atomic force microscopy; micromechanical devices; sensor phenomena and characterization;
fLanguage
English
Journal_Title
Sensors Journal, IEEE
Publisher
ieee
ISSN
1530-437X
Type
jour
DOI
10.1109/JSEN.2012.2232784
Filename
6376086
Link To Document