DocumentCode :
873946
Title :
KTa/sub 0.6/Nb/sub 0.4/O/sub 3/ ferroelectric thin film behavior at microwave frequencies for tunable applications
Author :
Laur, Vincent ; Rousseau, Anthony ; Tanné, Gérard ; Laurent, Paul ; Députier, Stéphanie ; Guilloux-Viry, Maryline ; Huret, Fabrice
Author_Institution :
Brest Univ.
Volume :
53
Issue :
12
fYear :
2006
fDate :
12/1/2006 12:00:00 AM
Firstpage :
2280
Lastpage :
2286
Abstract :
In this study about the relationships between structural and microwave electrical properties of KTa1-xNbxO3 (KTN) ferroelectric materials, a KTN thin film was deposited on different substrates to investigate how KTN growth affects the microwave behavior. Interdigital capacitors and stubs were made on these films through a simple engraving process. Microwave measurements under a static electric field showed the importance of the substrate on the circuit behavior and, notably, on the tuning factor
Keywords :
circuit tuning; ferroelectric thin films; microwave materials; potassium compounds; substrates; KTaO3NbO3; circuit behavior; engraving process; ferroelectric thin film; interdigital capacitors; microwave electrical properties; structural properties; tuning factor; Capacitors; Ferroelectric films; Ferroelectric materials; Microwave frequencies; Niobium; Sputtering; Substrates; Thin film circuits; Transistors; Tunable circuits and devices;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2006.174
Filename :
4037262
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=873946
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