DocumentCode
873971
Title
Piezoelectric ultrathin lead titanate films prepared by deposition of aquo-diol solutions
Author
Ricote, Jesus ; Holgado, Susana ; Ramos, Pablo ; Calzada, M.Lourdes
Author_Institution
Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, Madrid
Volume
53
Issue
12
fYear
2006
fDate
12/1/2006 12:00:00 AM
Firstpage
2299
Lastpage
2304
Abstract
We report on the preparation of continuous ultrathin ferroelectric films of pure lead titanate by chemical solution deposition (CSD) methods. Aquo-diol solutions highly diluted have been used to obtain films with thickness down to 13 nm, the lowest reported for CSD films. The formation of islands instead of continuous coatings, which has been reported when CSD is used to prepare ultrathin films, is avoided here. The piezoelectric activity of the films has been characterized by piezoresponse force microscopy, showing that the thinnest film obtained retains a significant piezoelectric activity at the nanoscale, which is promising for their use as transducer elements in nanoelectromechanical systems (NEMS)
Keywords
atomic force microscopy; ferroelectric thin films; lead compounds; liquid phase deposition; organic compounds; oxygen compounds; piezoelectric thin films; titanium compounds; PbTiO3; aquo-diol solution deposition; chemical solution deposition; lead titanate; piezoelectric activity; piezoelectric ultrathin films; piezoresponse force microscopy; ultrathin ferroelectric films; Capacitors; Chemicals; Coatings; Ferroelectric films; Ferroelectric materials; Micromechanical devices; Nanoelectromechanical systems; Piezoelectric films; Temperature; Titanium compounds;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2006.177
Filename
4037265
Link To Document