Electrostatic transducers for micromechanical resonators: free space and solid dielectric

Author

Kaajakari, Ville ; Alastalo, Ari T. ; Mattila, Tomi

Author_Institution

VTT, Tech. Res. Center of Finland, Espoo

Volume

53

Issue

12

fYear

2006

fDate

12/1/2006 12:00:00 AM

Firstpage

2484

Lastpage

2489

Abstract

Three electrostatic transduction methods are analyzed for a micromechanical, longitudinal mode, beam resonator. The conventional parallel plate transducer placed at the location of maximum displacement is compared to two solid, dielectric transducers internal to the resonator. Although the solid dielectric offers higher permittivity than the free-space-filled transducers, the unfavorable locations of the internal transducers reduce or even remove the performance advantage of the higher permittivity

Keywords

electrostatic devices; micromechanical resonators; permittivity; piezoelectric transducers; dielectric transducers; electrostatic transducer; free space; free-space-filled transducers; internal transducers; longitudinal mode beam resonator; micromechanical resonators; parallel plate transducer; permittivity; solid dielectric; Acoustic beams; Dielectrics; Electrodes; Electrostatics; Impedance; Micromechanical devices; Permittivity; Q factor; Solids; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.197

Filename

4037285