DocumentCode
874594
Title
Gold-coated scanning probes for direct `write`of sub-micron metallic structures
Author
Yapici, M.K. ; Lee, Hongseok ; Zou, Jingxin ; Liang, Hongjing
Author_Institution
Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX
Volume
3
Issue
3
fYear
2008
fDate
9/1/2008 12:00:00 AM
Firstpage
90
Lastpage
94
Abstract
The fabrication and application of new gold-coated scanning probes (SPs) for direct ´write´ of sub-micron metallic structures are reported. The SP consists of a base structure made of silicon nitride and a thin gold coating. The tip profile and radius of curvature are tightly controlled in the probe fabrication to ensure a predictable tip-substrate contact. By scanning a fabricated probe on a single crystal silicon surface in an ambient environment, sub-micron gold lines were formed as a result of direct gold material transfer from the SP tip onto the silicon surface, which is believed to be induced by the friction and wear associated with the probe scanning.
Keywords
coatings; gold; scanning probe microscopy; silicon compounds; Au-SiN; Si; direct write; friction; gold-coated scanning probes; silicon nitride; single crystal silicon surface; submicron metallic structures; thin gold coating; tip-substrate contact; wear;
fLanguage
English
Journal_Title
Micro & Nano Letters, IET
Publisher
iet
ISSN
1750-0443
Type
jour
DOI
10.1049/mnl:20080013
Filename
4634716
Link To Document