• DocumentCode
    874594
  • Title

    Gold-coated scanning probes for direct `write`of sub-micron metallic structures

  • Author

    Yapici, M.K. ; Lee, Hongseok ; Zou, Jingxin ; Liang, Hongjing

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX
  • Volume
    3
  • Issue
    3
  • fYear
    2008
  • fDate
    9/1/2008 12:00:00 AM
  • Firstpage
    90
  • Lastpage
    94
  • Abstract
    The fabrication and application of new gold-coated scanning probes (SPs) for direct ´write´ of sub-micron metallic structures are reported. The SP consists of a base structure made of silicon nitride and a thin gold coating. The tip profile and radius of curvature are tightly controlled in the probe fabrication to ensure a predictable tip-substrate contact. By scanning a fabricated probe on a single crystal silicon surface in an ambient environment, sub-micron gold lines were formed as a result of direct gold material transfer from the SP tip onto the silicon surface, which is believed to be induced by the friction and wear associated with the probe scanning.
  • Keywords
    coatings; gold; scanning probe microscopy; silicon compounds; Au-SiN; Si; direct write; friction; gold-coated scanning probes; silicon nitride; single crystal silicon surface; submicron metallic structures; thin gold coating; tip-substrate contact; wear;
  • fLanguage
    English
  • Journal_Title
    Micro & Nano Letters, IET
  • Publisher
    iet
  • ISSN
    1750-0443
  • Type

    jour

  • DOI
    10.1049/mnl:20080013
  • Filename
    4634716