• DocumentCode
    875320
  • Title

    Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

  • Author

    Fuchs, D.T. ; Chan, H.B. ; Stuart, H.R. ; Baumann, F. ; Greywall, D. ; Simon, M.E. ; Wong-Foy, A.

  • Author_Institution
    Lucent Technol. Bell Labs., Murray Hill, NJ, USA
  • Volume
    40
  • Issue
    2
  • fYear
    2004
  • Firstpage
    142
  • Lastpage
    143
  • Abstract
    A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 μs.
  • Keywords
    Mach-Zehnder interferometers; integrated optoelectronics; micromechanical devices; optical communication equipment; optical switches; optical waveguides; phase shifters; silicon-on-insulator; 150 mus; MEMS-based phase shifters; Monolithic integration; Si-SiO2; folded Mach-Zehnder interferometer switch; optical waveguides; power consumption; silicon waveguides; silicon-on-insulator; single SOI chip; switching time;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20040059
  • Filename
    1263122
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=875320