Title :
Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator
Author :
Fuchs, D.T. ; Chan, H.B. ; Stuart, H.R. ; Baumann, F. ; Greywall, D. ; Simon, M.E. ; Wong-Foy, A.
Author_Institution :
Lucent Technol. Bell Labs., Murray Hill, NJ, USA
Abstract :
A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 μs.
Keywords :
Mach-Zehnder interferometers; integrated optoelectronics; micromechanical devices; optical communication equipment; optical switches; optical waveguides; phase shifters; silicon-on-insulator; 150 mus; MEMS-based phase shifters; Monolithic integration; Si-SiO2; folded Mach-Zehnder interferometer switch; optical waveguides; power consumption; silicon waveguides; silicon-on-insulator; single SOI chip; switching time;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20040059
