Title :
Controlled Thermophoresis as an Actuation Mechanism for Noncantilevered MEMS Devices
Author :
Gotsmann, Bernd ; Despont, Michel ; Duerig, Urs
Author_Institution :
IBM Zurich Res. Lab., IBM Res. GmbH, Zurich
Abstract :
A microelectromechanical system actuator based on thermophoretic, or Knudson, forces is proposed using analytical calculations. It can potentially execute scanning or spinning motions of a body that is not mechanically attached to the reference substrate. For a silicon device of 100-mum diameter, it is calculated that it can be levitated at a distance of about 0.5 mum from a substrate and that it can execute scanning motion and use quasi-springs by laterally acting thermal forces. In this way, an engine with spinning motion of a floating body having a diameter of 200 mum with up to 5 kHz can be achieved.
Keywords :
elemental semiconductors; microactuators; silicon; Knudson; actuation mechanism; controlled thermophoresis; floating body; frequency 5 kHz; microelectromechanical system actuator; noncantilevered MEMS devices; quasi-springs; scanning motion; silicon device; size 100 mum; size 200 mum; spinning motion; Microactuators; microelectromechanical devices; micromotors; thermophoresis;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2008.2004785