Title :
A monolithic positioning system
Author :
Wunderlich, Ralf ; Thomas, Carsten ; Schumacher, Klaus
Author_Institution :
Dept. of Microelectron., Univ. of Dortmund, Germany
Abstract :
A monolithic positioning system operating with absolute coded magnetic scales is presented. The system is intended for precise absolute positioning in industrial applications. Mounted on a tool, the sensor system moves along a stationary scale. A sophisticated comb of sensors reads out the magnetic coding allowing the absolute position to be calculated. The main task has been to cancel the immense sensor offsets. Numerous structures have been measured in order to get statistically assured data of sensitivity and offset variation. A sensor readout technique without large offset cancellation circuitry is discussed. Furthermore a novel linear operational transconductance amplifier (OTA) is shown.
Keywords :
CMOS analogue integrated circuits; magnetic sensors; operational amplifiers; position measurement; CMOS; absolute coded magnetic scales; industrial applications; large offset cancellation circuitry; linear operational transconductance amplifier; magnetic coding; monolithic positioning system; precise absolute positioning; sensor offsets canceling; sensor system; CMOS technology; Circuits; Magnetic materials; Magnetic sensors; Microelectronics; Operational amplifiers; Position measurement; Semiconductor device measurement; Sensor systems; Transconductance;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.2003.821772
