DocumentCode

877675

Title

Orientation dependence of built-in surface charge on thermally oxidized Silicon

Author

Balk, P. ; Burkhardt, P.J. ; Gregor, L.V.

Volume

53

Issue

12

fYear

1965

Firstpage

2133

Lastpage

2134

Keywords

Aluminum; Capacitance measurement; Electric variables measurement; Electrodes; Equations; Inspection; Oxidation; Silicon; Temperature control; Testing;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/PROC.1965.4513

Filename

1446443