Title :
An analog system for measurement of effective surface mobility in MOS devices
Author :
Armstrong, W.E. ; Lidke, J.R.
fDate :
4/1/1973 12:00:00 AM
Abstract :
A circuit consisting of several operational amplifiers and analog multiplier/dividers is used with a conductance measurement system to measure effective surface mobility of MOS devices as a function of gate voltage. Accuracy is limited to gate voltages about 1.5 V greater in magnitude than device threshold.
Keywords :
Conduction electron mobility; Measurement systems; Metal-insulator-semiconductor devices; Surface electron states; Surface measurement; conduction electron mobility; measurement systems; metal-insulator-semiconductor devices; surface electron states; surface measurement; AC generators; Capacitance; Circuit testing; DC generators; Equations; MOS devices; Measurement techniques; Operational amplifiers; Substrates; Threshold voltage;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.1973.1050368
