DocumentCode

878057

Title

High resistivity sputtered tantalum films for microelectronic applications

Author

Krikorian, E. ; Berson, B.E.

Volume

53

Issue

12

fYear

1965

Firstpage

2164

Lastpage

2164

Keywords

Circuits; Conductivity; Electrical resistance measurement; Low voltage; Microelectronics; Preamplifiers; Resistors; Sputtering; Substrates; Temperature;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/PROC.1965.4546

Filename

1446476