A digital hygrometer using a polyimide film relative humidity sensor

Author

Shibata, Hideo ; Ito, Masahiro ; Asakursa, Masahiro ; Watanabe, Kenzo

Author_Institution

Dev. Lab., Kurabe Ind. Corp., Hamamatsu, Japan

Volume

45

Issue

2

fYear

1996

fDate

4/1/1996 12:00:00 AM

Firstpage

564

Lastpage

569

Abstract

A digital hygrometer using a relative humidity sensor is developed. The sensor consists of a polyimide film spin-coated onto an Si substrate. The sensor model for signal processing, which describes the sensor capacitance in terms of relative humidity and temperature in closed form, is derived first. The interface appropriate for the sensor model, based on a relaxation oscillator, is designed next. Finally, a prototype hygrometer built using a one-chip microprocessor and its performance are described to demonstrate the validity of the sensor model and interface

Keywords

adsorption; computerised instrumentation; digital instrumentation; electric sensing devices; elemental semiconductors; environmental factors; humidity control; humidity measurement; polymer films; relaxation oscillators; signal processing; silicon; Si substrate; digital hygrometer; interface; one-chip microprocessor; performance; polyimide film; polyimide film relative humidity sensor; prototype; relative humidity; relaxation oscillator; sensor capacitance; sensor model; signal processing; spin-coated film; Capacitance; Capacitive sensors; Humidity; Oscillators; Polyimides; Semiconductor films; Sensor phenomena and characterization; Signal processing; Substrates; Temperature sensors;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.492788

Filename

492788