• DocumentCode
    883452
  • Title

    Evaluation of electron injection current density in p-layers for injection modeling of I/sup 2/L

  • Author

    Heimeier, Helmut H. ; Berger, Horst H.

  • Volume
    12
  • Issue
    2
  • fYear
    1977
  • fDate
    4/1/1977 12:00:00 AM
  • Firstpage
    205
  • Lastpage
    206
  • Abstract
    Proportionality between electron injection current density and sheet resistance of p-layers having a sink boundary has been found over a two orders of magnitude range of sheet resistance. This facilitates prediction of electron injection parameters for injection modeling and process control of I/SUP 2/L/MTL.
  • Keywords
    Bipolar integrated circuits; Integrated logic circuits; Semiconductor device models; bipolar integrated circuits; integrated logic circuits; semiconductor device models; Charge carrier processes; Current density; Doping; Electrons; Laboratories; Predictive models; Process control; Production; Radiative recombination; Resists;
  • fLanguage
    English
  • Journal_Title
    Solid-State Circuits, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9200
  • Type

    jour

  • DOI
    10.1109/JSSC.1977.1050872
  • Filename
    1050872
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=883452