• DocumentCode
    887165
  • Title

    Revised Funnel Calculations for Heavy Particles with High dE/dx

  • Author

    Oldham, T.R. ; McLean, F.B. ; Hartman, J.M.

  • Author_Institution
    U.S. Army Laboratory Command Harry Diamond Laboratories Adelphi, MD 20783-1197
  • Volume
    33
  • Issue
    6
  • fYear
    1986
  • Firstpage
    1646
  • Lastpage
    1650
  • Abstract
    A modification to the effective funnel length model is presented. This modification is based on the assumption that for high dE/dx particles with short track lengths, most of the potential is dropped beyond the end of the track. The revised model then calculates an average field along the track which is smaller than the field calculated by the original model. The revised model results are compared with experimental results for several ions incident on n-type and p-type Si and n-type GaAs. Agreement with experiment for heavy ions is generally much better for the revised model than for the original model. For alpha particles and Be ions, where the original model worked well, the original result is recovered.
  • Keywords
    Alpha particles; Charge measurement; Computer simulation; Current measurement; Doping; Laboratories; Length measurement; Particle measurements; Particle tracking; Semiconductor process modeling;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1986.4334657
  • Filename
    4334657