DocumentCode
887207
Title
IEEE Transactions on Semiconductor Manufacturing publication information
Volume
17
Issue
1
fYear
2004
Abstract
Provides a listing of current committee members and society officers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2004.824188
Filename
1265760
Link To Document