DocumentCode
887304
Title
A series solution of the diffusion equation
Author
Chen, W.H.
Volume
55
Issue
1
fYear
1967
Firstpage
101
Lastpage
101
Abstract
A series solution of a diffusion equation is built in terms of repeated integrations of an error function and Hermite polynomials. This series is capable of solving many complicated diffusion problems, such as impurities redistribution in a semiconductor during thermal oxidation (a problem of diffusion with moving boundaries) and repeated diffusion under different environments.
Keywords
Boron; Boundary conditions; Conducting materials; Equations; FETs; Oxidation; Polynomials; Semiconductor impurities; Space heating; Zirconium;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1967.5400
Filename
1447330
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