• DocumentCode
    887304
  • Title

    A series solution of the diffusion equation

  • Author

    Chen, W.H.

  • Volume
    55
  • Issue
    1
  • fYear
    1967
  • Firstpage
    101
  • Lastpage
    101
  • Abstract
    A series solution of a diffusion equation is built in terms of repeated integrations of an error function and Hermite polynomials. This series is capable of solving many complicated diffusion problems, such as impurities redistribution in a semiconductor during thermal oxidation (a problem of diffusion with moving boundaries) and repeated diffusion under different environments.
  • Keywords
    Boron; Boundary conditions; Conducting materials; Equations; FETs; Oxidation; Polynomials; Semiconductor impurities; Space heating; Zirconium;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1967.5400
  • Filename
    1447330