• DocumentCode
    888199
  • Title

    Fabrication of SAW three phase unidirectional transducers using dielectric crossovers

  • Author

    Richie, S.M.

  • Volume
    29
  • Issue
    9
  • fYear
    1993
  • fDate
    4/29/1993 12:00:00 AM
  • Firstpage
    801
  • Lastpage
    802
  • Abstract
    Two common dielectrics used for isolation in semiconductor device fabrication, spin on glass (SOG) and polyimide, are evaluated for the fabrication of dielectric supported crossover interconnections for surface acoustic wave (SAW) devices employing three-phase unidirectional transducers (TPUDTs). An all-aluminium reliable fabrication process was developed using polyimide.
  • Keywords
    piezoelectric transducers; surface acoustic wave devices; Al electrode; SAW; SOG; crossover interconnections; dielectric crossovers; fabrication process; polyimide; spin on glass; surface acoustic wave; three phase unidirectional transducers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930535
  • Filename
    211278
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=888199