DocumentCode
888235
Title
Ion Implantation Data Acquisition System
Author
Struttmann, D.A. ; Anderl, R.A.
Author_Institution
Idaho National Engineering Laboratory EG&G Idaho Inc. P. O. Box 1625 Idaho Falls, ID 83415
Volume
34
Issue
4
fYear
1987
Firstpage
976
Lastpage
979
Abstract
This paper describes a data acquisition system developed for hydrogen ion-driven permeation experiments for materials relevant to fusion technology. The system consists of an IBM PC-AT, CAMAC interface to diagnostic instrumentation and custom-developed software (BASIC) to provide time-history information for signals from several instruments including three quadrupole mass spectrometers.
Keywords
CAMAC; Computer interfaces; Control systems; Data acquisition; Hardware; Hydrogen; Instruments; Ion accelerators; Ion implantation; Mass spectroscopy;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1987.4334779
Filename
4334779
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