• DocumentCode
    890759
  • Title

    Sputter-deposited erbium-doped Y2O3 active optical waveguides

  • Author

    Hoekstra, T.H. ; Lambeck, P.V. ; Albers, H. ; Popma, T.J.A.

  • Author_Institution
    Mesa Res. Inst., Enschee, Netherlands
  • Volume
    29
  • Issue
    7
  • fYear
    1993
  • fDate
    4/1/1993 12:00:00 AM
  • Firstpage
    581
  • Lastpage
    583
  • Abstract
    A signal enhancement of 10 dB at 1535 nm with a low launched pump power of 1 mW at 1480 nm is achieved for sputtered Er3+:Y2O3 channel waveguides on oxidised silicon substrates. With the developed reactive co-sputtering process using sputterguns the erbium concentration can be varied easily and reproducibly.
  • Keywords
    erbium; integrated optics; optical pumping; optical waveguides; optical workshop techniques; solid lasers; sputter deposition; sputtered coatings; yttrium compounds; 1 mW; 1480 nm; 1535 nm; Si; Y 2O 3:Er 3+-SiO 2-Si; active optical waveguides; low launched pump power; reactive co-sputtering process; signal enhancement; sputterguns;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930390
  • Filename
    211866
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=890759