Low-noise automated measurement system for low-frequency current fluctuations in thin-oxide silicon structures

Author

Saletti, Roberto ; Neri, Bruno

Author_Institution

Centro di Studio per Metodi e Dispositivi per Radiotransmissioni, Consiglio Nazionale delle Richerche, Pisa, Italy

Volume

41

Issue

1

fYear

1992

fDate

2/1/1992 12:00:00 AM

Firstpage

123

Lastpage

127

Abstract

The design of an automated system for low-noise measurement of low-frequency current fluctuations in thin-oxide silicon devices is presented. The aim of these measurements is to study the current tunneling through the oxide, and to investigate its correlations with the oxide breakdown. The dedicated system is realized by integrating a personal computer commercial acquisition board with custom designed low-noise preamplifiers

Keywords

computerised instrumentation; electric breakdown of solids; electric noise measurement; fluctuations; insulating thin films; metal-insulator-semiconductor structures; microcomputer applications; silicon compounds; tunnelling; 10 nm; MOS structure; SiO₂ film; acquisition board; automated system; correlations; current tunneling; custom designed low-noise preamplifiers; low-frequency current fluctuations; low-noise measurement; oxide breakdown; personal computer; Breakdown voltage; Current measurement; Dielectric breakdown; Electric breakdown; Fluctuations; Microcomputers; Sampling methods; Silicon devices; Stress; Tunneling;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.126645

Filename

126645