Title :
Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE
Author :
Honda, S. ; Wu, Z. ; Matsui, J. ; Utaka, K. ; Edura, T. ; Tokuda, M. ; Tsutsui, K. ; Wada, Y.
Author_Institution :
Sch. of Sci. & Eng., Waseda Univ., Tokyo
Abstract :
A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4 nm at -10 dB transmission-level was obtained with a tuning range of about 18 nm using the thermo- optic effect.
Keywords :
Bragg gratings; optical fabrication; optical tuning; optical waveguides; rib waveguides; silicon-on-insulator; sputter etching; thermo-optical effects; Si; deep reactive-ion etching; etched side wall; first-order Bragg grating; largely-tunable wideband Bragg grating; silicon-on-insulator rib waveguide; thermooptic effect;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20070884
