DocumentCode
894307
Title
Efficient sputtering in a cold-cathode discharge in magnetron geometry
Author
Wasa, Kiyotaka ; Hayakawa, S.
Volume
55
Issue
12
fYear
1967
Firstpage
2179
Lastpage
2180
Abstract
Efficient sputtering has been achieved in a cold-cathode discharge in a magnetron geometry under a strong magnetic field. The sputtering may be readily used for the production of thin-film microcircuits. The mechanism of the sputtering is discussed in connection with the mode of discharge.
Keywords
Cathodes; Effective mass; Electrons; Geometry; Germanium; Magnetic anisotropy; Magnetic fields; Perpendicular magnetic anisotropy; Sputtering; Surface discharges;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1967.6113
Filename
1448043
Link To Document