• DocumentCode
    895947
  • Title

    Fuzzy optical metrology

  • Author

    Caulfield, H. John

  • Author_Institution
    Alabama A&M Univ., Normal, AL, USA
  • Volume
    4
  • Issue
    2
  • fYear
    1996
  • fDate
    5/1/1996 12:00:00 AM
  • Firstpage
    206
  • Lastpage
    208
  • Abstract
    When operating in the real world, the conventional fuzzy approach is to extract crisp data then fuzzify it. This paper explores the concept of measuring fuzzy set memberships directly and obtaining the underlying crisp values by defuzzification. Both speed and accuracy advantages of fuzzy over conventional, crisp metrology are noted
  • Keywords
    fuzzy set theory; measurement theory; optical variables measurement; defuzzification; fuzzy optical metrology; fuzzy set membership direct measurement; Data mining; Fourier transforms; Fuzzy control; Fuzzy logic; Fuzzy sets; Fuzzy systems; Goniometers; Helium; Mathematics; Metrology;
  • fLanguage
    English
  • Journal_Title
    Fuzzy Systems, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1063-6706
  • Type

    jour

  • DOI
    10.1109/91.493914
  • Filename
    493914
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=895947