GaAs 1 kbit static RAM with self-aligned FET technology

A GaAs-1 kbit RAM is demonstrated to realize high-speed switching at the LSI level. The SAINT FET is utilized to eliminate the surface depletion without an increase of excess capacitance. To lower the threshold voltage standard deviation, a one-direction gate arrangement is adopted. A pull-up circuit is also a new addition to the first reported RAM. The resulting RAM performances are 1.5 ns address access time with 369 mW power consumption. The minimum write-enable pulsewidth is less than 2 ns. The maximum number of good bits is 1001 bits/1024 bits. The problems of mass production of GaAs LSI are discussed.