DocumentCode :
8971
Title :
Observation of Au nanoparticles on the surface of silicon nanowire grown by rapid thermal chemical vapour deposition
Author :
Dong Wook Kwak ; Dong Wha Lee ; Hoon Young Cho
Author_Institution :
Dept. of Phys., Dongguk Univ., Seoul, South Korea
Volume :
10
Issue :
3
fYear :
2015
fDate :
3 2015
Firstpage :
161
Lastpage :
166
Abstract :
The size evolution of gold (Au) nanoparticles (NPs) on the sidewall surface of silicon (Si) nanowires (NWs) has been investigated by thermal treatments, using high-angle annular dark field scanning transmission electron microscopy. The Si NWs grown at 550°C by rapid thermal chemical vapour deposition have been observed to be surrounded by Au NPs with less than 5 nm diameter and ~1012 cm-2 density on the whole Si NW surface. To explore the size change of Au NPs, the Au NPs on the Si NW were annealed ex situ at the temperature range of 700-900°C for 20 min. The sizes of NPs for samples annealed at 700, 800 and 900°C represent Gaussian distribution with the average size of 4, 6 and 7 nm, respectively, while at high temperatures above 900°C, they change to a bimodal distribution. It is suggested that the surface diffusion rate of Au NPs on Si NW is much lower than that on the Si substrate because of the substitutional diffusion mechanism.
Keywords :
Gaussian distribution; chemical vapour deposition; elemental semiconductors; gold; nanofabrication; nanoparticles; nanowires; scanning-transmission electron microscopy; semiconductor growth; silicon; surface diffusion; Au; Gaussian distribution; Si; bimodal distribution; high-angle annular dark held scanning transmission electron microscopy; nanoparticles; rapid thermal chemical vapour deposition; sidewall surface; silicon nanowire surface; size 4 nm to 7 nm; size evolution; substitutional diffusion mechanism; surface diffusion rate; temperature 550 degC to 900 degC; thermal treatments; time 20 min;
fLanguage :
English
Journal_Title :
Micro & Nano Letters, IET
Publisher :
iet
ISSN :
1750-0443
Type :
jour
DOI :
10.1049/mnl.2014.0389
Filename :
7073716
Link To Document :
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