Computer-aided design in VLSI device development

Computer-aided design (CAD) has been used extensively in the development of VLSI MOS technology at Hewlett-Packard Laboratory. The CAD system for MOS device design is described. The development of the p-channel transistor with submicrometer channel length, trench isolation in CMOS, and side-wall-masked isolation (SWAMI) for VLSI technology are then presented, followed by a discussion of the techniques used in the simulation of parasitic capacitances in multilayer interconnects for circuit performance evaluations.