• DocumentCode
    901480
  • Title

    Depth profiling by phase shift detection in scanning electron-acoustic microscopy

  • Author

    Marty-Dessus, D. ; Franceschi, J.L.

  • Author_Institution
    Lab. d´Opt. Electron., CNRS, Toulouse, France
  • Volume
    29
  • Issue
    10
  • fYear
    1993
  • fDate
    5/13/1993 12:00:00 AM
  • Firstpage
    843
  • Lastpage
    844
  • Abstract
    A method of depth profiling in an object is presented. A modulated electron beam produces acoustic waves which are detected by a piezoelectric sensor. An adapted treatment of the transmitted signal enables cuts to be obtained at different depths within the sample.
  • Keywords
    acoustic imaging; fault location; integrated circuit testing; piezoelectric transducers; scanning electron microscopy; ultrasonic applications; ultrasonic devices; IC testing; acoustic waves; depth profiling; modulated electron beam; phase shift detection; piezoelectric sensor; scanning electron-acoustic microscopy; subsurface defects detection; transmitted signal;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930563
  • Filename
    216262
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=901480