Title :
Enhanced Radiation Effects on Submicron Narrow-Channel NMOS
Author :
Chen, J.Y. ; Henderson, R.C. ; Martin, R. ; Patterson, D.O.
Author_Institution :
Hughes Research Laboratories 3011 Malibu Canyon Road Malibu, CA 90265
Abstract :
We have observed an enhanced radiation sensitivity for narrow-channel NMOS transistors. The radiation-induced threshold shift increases rapidly as the channel width decreased below 4 ¿m. For example, with 4.5 ¿m channel lengths the radiation sensitivity for 0.8 ¿m wide FETs is twice that for 5 ¿m wide devices. This geometry dependence can be explained qualitatively by two-dimensional potential calculations. These calculations show the fringing field influence on threshold voltage is reduced after radiation, leading to a larger total shift for the narrow channel devices.
Keywords :
Boron; Capacitance; FETs; Geometry; Implants; Laboratories; MOS devices; MOSFETs; Radiation effects; Threshold voltage;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1982.4336428