Title :
Displacement sensor using channelled spectrum dispersed on a linear CCD array
Author :
Taplin, S. ; Podoleanu, A.Gh. ; Webb, David J. ; Jackson, D.A.
Author_Institution :
Kent Univ., Canterbury, UK
fDate :
5/13/1993 12:00:00 AM
Abstract :
A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 mu m.
Keywords :
CCD image sensors; displacement measurement; light interferometers; measurement by laser beam; optical sensors; 1.5 mm; broadband source; channelled spectrum; laser diode source; linear CCD array; low coherence interferometric sensor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930598