DocumentCode
902763
Title
Frequency analysis of the probe current in an RF discharge
Author
Sager, Omer
Volume
57
Issue
2
fYear
1969
Firstpage
227
Lastpage
228
Abstract
The harmonics of the probe current under the influence of a capacitively coupled disturbing voltage are discussed. From the ratio of two amplitudes the unknown RF voltage and the necessary correction of the direct current can be determined.
Keywords
Equations; Plasma density; Plasma properties; Polynomials; Probes; Radio frequency; Stability; Testing; Voltage; Writing;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1969.6931
Filename
1448861
Link To Document